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All-In-One 3D Inspection Module

The Saber3D Series is the latest major advancement from Coherix for semiconductor inspection and metrology. Coherix provides high-speed, in-line inspection products for the electronics and semiconductor industries, eliminating the need for handlers to stop the assembly process for inspection. This solution streamlines the process, increases throughput and enhances accuracy.

Saber3D measures semiconductor packages optically on-the-fly. This high definition vision system performs 3D measurements with package-quality inspection options and processes them internally without the need for external computing resources. Saber3D incorporates a state-of-the-art LED lighting system with multiple cameras similar to the 3DX.

The image processing is carried out by Coherix i-Cite software, providing a wide range of tools for better process control and yield optimization. This total package creates the most compact, advanced and cost-effective 3D inspection solution available



  • 3D high-definition, multi-camera triangulation technology
  • Snapshot area measurements – no lasers, no line scanning
  • Multi-spectral LED strobe lighting
  • Simultaneous multi-part and ROI capability increases throughput
  • Latest configuration of leaded, BGA and QFN package styles supported
  • No hardware change-over required between package types
  • No external computing resources required

Technical Specifications

  • FOV: 35 mm x 35 mm
  • Camera resolution: 4 MP
  • Multi-part inspection: Yes
  • Exposure time: 50 μs
  • Image trigger: XY dual internal strobe
  • Inspection motion: Variable to 150 mm/sec
  • Region of interest: User configurable – full range
  • Illumination: Solid state LED w/ internal strode control
  • Module weight: 6.5 kg (14.3 lbs)
  • Power consumption: 60 watts @24 VDC
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